ANSI/IEST/ISO 14644-2

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Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

standard by ANSI/IEST/ISO , 12/15/2015

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Full Description

This part of ISO 14644 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

This part of ISO 14644 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard. See more

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Product Details

Edition:

2nd

Published:

12/15/2015

Number of Pages:

22

File Size:

1 file

Redline File Size:

2 files

Product Code(s):

1, 1, 1

Note:

This product is restricted and cannot be purchased in the following countries Ukraine, Russia, Belarus