BS 13/30203227 DC Historical

1854729

BS ISO 13083. Surface chemical analysis. Scanning Probe Microscopy. Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

standard by BSI Group , 03/21/2013

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Cross References:
ISO 18115-2:2010 ISO 18516


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Document History

  1. BS ISO 13083:2015


    Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

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  2. BS 13/30203227 DC

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    BS ISO 13083. Surface chemical analysis. Scanning Probe Microscopy. Standards on the definition and calibration of spatial resolution of Scanning Spreading Resistance Microscopy and Scanning Capacitance Microscopy

    • Historical Version

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Product Details

Published:

03/21/2013

Number of Pages:

20