BS EN ISO 14644-9:2012 Historical

1841263

Cleanrooms and associated controlled environments-Classification of surface cleanliness by particle concentration

standard by British Standard / European Standard / International Organization for Standardization , 08/31/2012

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Cross References:
ISO 14644-6:2007
ISO 4287:1997
ISO 4288:1996
ISO 5725-2:1994
ISO 10015:1999
ISO 10576-1:2003
ISO 16232-2:2007
ISO 16232-3:2007
ISO 16232-4:2007
ISO 16232-5:2007
ISO/TS 21748:2004
IEC 61340-5-1:2007
ASTM E18-07
ASTM E1216-06
ASTM F312-08
ASTM F24-09
ASTM F303-08
CLC/TR 61340-5-2:2008
IEST-RP-CC022 .2-2004
IEST-STD-CC1246D
SEMI E43-0301
SEMI E78-0706


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Document History

  1. BS EN ISO 14644-9:2022


    Cleanrooms and associated controlled environments-Assessment of surface cleanliness for particle concentration

    • Most Recent

  2. BS EN ISO 14644-9:2012

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    Cleanrooms and associated controlled environments-Classification of surface cleanliness by particle concentration

    • Historical Version

  3. BS 08/30190157 DC


    BS EN ISO 14644-9. Cleanrooms and associated controlled environments. Part 9. Classification of surface particle cleanliness

    • Historical Version

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Product Details

Published:

08/31/2012

ISBN(s):

9780580645839

Number of Pages:

36

Same As:

ISO 14644-9:2012