ISO 13084:2025 ✓ Most Recent

3033818

Surface chemical analysis - Mass spectrometries - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

standard by International Organization for Standardization , 10/01/2025

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Full Description

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. This document is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. This document gives guidance for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.

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Document History

  1. ISO 13084:2025

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    Surface chemical analysis - Mass spectrometries - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

    • Most Recent

  2. ISO 13084:2018


    Surface chemical analysis - Secondary ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary ion mass spectrometer

    • Historical Version

  3. ISO 13084:2011


    Surface chemical analysis - Secondary-ion mass spectrometry - Calibration of the mass scale for a time-of-flight secondary-ion mass spectrometer

    • Historical Version

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Published:

10/01/2025

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1 file

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This product is restricted and cannot be purchased in the following countries Ukraine, Russia, Belarus