ISO/FDIS 14644-14 Historical

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Assessment of suitability for use of equipment by airborn particle concentration

standard by International Organization for Standardization (Final Draft Standard) , 05/12/2016

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Full Description

This International Final Draft Standard specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components, tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1). See more

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Document History

  1. ISO 14644-14


    Cleanrooms and associated controlled environments -- Part 14: Assessment of suitability for use of equipment by airborne particle concentration

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  2. ISO/FDIS 14644-14

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    Assessment of suitability for use of equipment by airborn particle concentration

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Product Details

Published:

05/12/2016

Number of Pages:

28