ISO/TR 19319:2013 ✓ Most Recent

1854223

Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

standard by International Organization for Standardization (Technical Report) , 03/15/2013

Track This

Identical Versions Available

Full Description

ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

See more

Also Bought By Customers

 

Document History

  1. ISO/TR 19319:2013

    👀 currently
    viewing


    Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

    • Most Recent

  2. ISO/TR 19319:2003


    Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area, and sample area viewed by the analyser

    • Historical Version

Order Options

Delivery Options
Price: $287.00
Available for Immediate Download

Product Details

Published:

03/15/2013

File Size:

1 file

Same As:

BS PD ISO/TR 19319:2013

Note:

This product is restricted and cannot be purchased in the following countries Ukraine, Russia, Belarus