ISO/TR 15969:2021 ✓ Most Recent

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Surface chemical analysis - Depth profiling - Measurement of sputtered depth

standard by International Organization for Standardization (Technical Report) , 03/01/2021

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Full Description

ISO/TR 15969:2021 provides guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 µm. See more

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  1. ISO/TR 15969:2021

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    Surface chemical analysis - Depth profiling - Measurement of sputtered depth

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  2. ISO/TR 15969:2001


    Surface chemical analysis - Depth profiling - Measurement of sputtered depth

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Product Details

Edition:

2nd

Published:

03/01/2021

Number of Pages:

20

File Size:

1 file

Note:

This product is restricted and cannot be purchased in the following countries Ukraine, Russia, Belarus